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ANTI REFLECTIVE COATING

Anti-reflective thin film coating is required in the manufacture of solar cells to aide in the entrapment of light into the cell. It is typically applied by the atmospheric pressure chemical deposition process (APCVD) using titanium oxide (TiO2) or plasma enhanced chemical vapor deposition (PECVD) using silicon nitride. BTU offers it’s TCD furnace for the application of anti-reflective coating which is the APCVD process. This is an in-line solution.

 

 

 

 

 

 

PRODUCTS:
In-Line Diffusion SystemDiffusion FurnacePhosphorus Doper
MetallizationAnti Reflective Coating

PROCESS:
DiffusionMetallization • Anti Reflective Coating • Thin Film

Diffusion Image