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PHOSPHORUS DOPER |
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Overview | Standard Features | Available Options | Information Request BTU’s in-line doper has been specifically designed for the phosphorus diffusion process. The doper is available as a stand-alone unit, or can be purchased as part of a fully integrated continuous diffusion line where it is combined with BTU’s TFQ Series Quartz-Lined Diffusion Furnace. The doper system features a nozzle-less, ultrasonic, direct spray system. The single head system produces uniform and repeatable results across all lanes. BTU’s Phosphorus Doper uses three methods of control to adjust dopant application thickness. Coating thickness is controlled through the use of a transversing head system. Uniformity and repeatability are further enhanced through the use of a Liquid Delivery Pump providing� precision flow rate control and an Adjustable Air Director controlling the spray pattern width and uniformity. Metal-free drive components ensure there is no metal contamination
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