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PHOSPHORUS DOPER

Overview | Standard Features | Available Options | Information Request

STANDARD FEATURES INCLUDE:

Nozzle-less Spray Head

Integrated Doper and Furnace Control

Redundant Dopant and Furnace Controls

Coating Deposion Control

Metal-Free Dopant Delivery System



PRODUCTS:
In-Line Diffusion SystemDiffusion Furnace • Phosphorus Doper
MetallizationAnti Reflective Coating

PROCESS:
DiffusionMetallizationAnti Reflective CoatingThin Film

Diffusion Furnace Image