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Overview
| Standard Features
| Available Options
| Information Request
AVAILABLE OPTIONS INCLUDE:
One-shift Dopant Reservoirs
6 Lane Operation
Solvent Safety Package
Panel interlocks
Mass Flow Control
Uninterruptible Power Supply
Heater Failure Monitoring
Remote Diagnostics
Spares Packages
PRODUCTS:
Meridian In-Line Diffusion System
• Meridian Diffusion Furnace
Metallization
• Anti Reflective Coating
PROCESS:
Diffusion
• Metallization
• Anti Reflective Coating
• Thin Film
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