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IN-LINE DIFFUSION SYSTEM

Overview | Standard Features | Available Options | Information Request

AVAILABLE OPTIONS INCLUDE:

One-shift Dopant Reservoirs

6 Lane Operation

Solvent Safety Package

Panel interlocks

Mass Flow Control

Uninterruptible Power Supply

Heater Failure Monitoring

Remote Diagnostics

Spares Packages

 

PRODUCTS:
Meridian In-Line Diffusion System • Meridian Diffusion Furnace
MetallizationAnti Reflective Coating

PROCESS:
DiffusionMetallizationAnti Reflective CoatingThin Film

 

Diffusion Furnace Image