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MERIDIAN IN-LINE DIFFUSION SYSTEM |
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Overview | Standard Features | Available Options | Information Request The Meridian In-line Diffusion System combines our latest second generation phosphorus coating technology with our flagship quartz lined diffusion furnaces. The system is comprised of a direct spray phosphorus coater integrated with a conveyor belt diffusion furnace for processing silicon solar cells. The coater now includes back-side, topside and drying capability which can translate into improved cell efficiency. The system can be configured to achieve up to 1500 wafers per hour (156 mm). The in-line process offers reduced wafer handling and greater through-put than traditional batch processing. Reduced handling translates into lower breakage rates and improved yield.
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