Products

Diffusion Furnaces

BTU Inline diffusion processes offer unique processing opportunities for solar cell emitter formation. Unlike POCl3 diffusion batch processing, inline processing provides advantages in throughput, junction depth control, uniformity, lower dopant material costs and an overall lower cost per watt. Inline processing is compatible with PERC and p-type traditional cells. Moreover, inline diffusion processing provides opportunities beyond traditional p-type cell designs by providing technical and cost benefits enabling n-type cell structures to become more cost competitive.


BTU has the largest installed base of inline diffusion systems operating in the field of any inline diffusion provider.

BTU’s Meridian™ series inline diffusion furnaces and equipment solutions offer flexible, cost competitive solutions to meet the most demanding process requirements and throughput.

Contact BTU to learn more about how in-line diffusion furnaces reduce your costs while shortening process times.

Datasheet


Meridian™ Furnace

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Papers & Articles

PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers 

Diffusion Techniques, From Blue-Cell Theory To In-Fab Practice 

Solar Cell Process Temperature Measurements 

Cost of ownership and overall equipment efficiency: a photovoltaics perspective