Diffusion Furnaces

BTU Inline diffusion processes offer unique processing opportunities for solar cell emitter formation. Unlike POCl3 diffusion batch processing, inline processing provides advantages in throughput, junction depth control, uniformity, lower dopant material costs and an overall lower cost per watt. Inline processing is compatible with PERC and p-type traditional cells. Moreover, inline diffusion processing provides opportunities beyond traditional p-type cell designs by providing technical and cost benefits enabling n-type cell structures to become more cost competitive.

BTU is the only inline diffusion supplier who consistently invests in new inline technologies and processes to help customers achieve lower cost per watt high efficiency solar cells. BTU has the largest installed base of inline diffusion systems operating in the field of any inline diffusion provider. BTU is the authority on inline diffusion and with its partners has the know-how to properly implement and maximize the benefits of inline diffusion. The process can be integrated into new and existing solar cell lines.

BTU Meridian Inline FurnaceProcess innovations include unique dopant application methods, dopant formulations, patterned doping,ultra-high throughput technology (SWIFT) and co-diffusion of n-type bifacial cell structures to name a few. These innovations contribute to lowering cost per watt and increasing cell efficiency.

BTU’s Meridian™ series inline diffusion furnaces and equipment solutions offer flexible, cost competitive solutions to meet the most demanding process requirements and throughput.

Contact BTU to learn more about how in-line diffusion furnaces reduce your costs while shortening process times.

Papers & Articles

PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers 

Diffusion Techniques, From Blue-Cell Theory To In-Fab Practice 

Solar Cell Process Temperature Measurements 

Cost of ownership and overall equipment efficiency: a photovoltaics perspective 

In The News

BTU Debuts SWIFT Inline Diffusion Technology at SNEC for Scalable, Ultra-High Throughput

BTU International Touts Continuous Processing Advantages

BTU International to Feature Next-Generation Thermal Processing Capabilities at PV Taiwan