In 2009, BTU International introduced the Tritan™ firing furnace featuring a unique multi-belt/dual speed conveyor, dual lane capability, wavelength optimization technology, and full chamber access. It is designed for maximum thermal performance, uptime and throughput at reduced Cost of Ownership.

The Tritan™ furnace is designed for faster process speed in combination with innovative heating and gas delivery technology. The enhanced rapid thermal processing capabilities empower users with more versatility to optimize the thermal profile for different silicon and paste materials. With optimized wavelengths, wafers can be heated with a very steep temperature gradient. Drying and binder burnout lengths have also been optimized for complete removal of organics.

The higher belt speed driven by increased spike heating, however, does not result in a longer furnace. The proprietary multi-drive system allows the drying and cooling sections to run at a reduced speed, thus offering improved performance for all three process steps. This is achieved without compromising the footprint or the throughput of the Tritan™. Meanwhile, smooth belt and gentle air flow ensure high yield for thin wafers.

The process chamber is designed to provide access from both top and bottom of the conveyor, the first of its kind in firing furnaces, for easy maintenance and serviceability. Full chamber access, combined with extended lamp life, minimizes downtime. The drying section features stainless steel lining for easy cleaning.

The Tritan™ firing furnace is configurable to accommodate both single and dual lane processing. The flexibility to achieve 30MW or 60MW output on single belt width increases throughput scalability while reducing capital expenditure. The Tritan™ can process 125X125mm, 156X156mm and larger wafers; a standalone dryer is also available.

The furnace can be integrated with all mainstream printing/testing equipment. As other BTU products Tritan™ is controlled by BTU’s windows-based, multi-lingual WINCON™ software with touch screen GUI.