ANTI REFLECTIVE COATING FURNACE

Overview | Standard Features | Available Options | Specifications | Information Request

STANDARD FEATURES INCLUDE:

Coating Thickness up to 750 Angstroms

Bubbler Controls

+/- 2^oC Thermal Uniformity

Controlled Water Cooling

16” wide Conveyor

In-Line Processing

PRODUCTS:
Meridian In-Line Diffusion System • Meridian Diffusion Furnace
Metallization • Anti Reflective Coating

PROCESS:
Diffusion • Metallization • Anti Reflective Coating • Thin Film