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IN-LINE DIFFUSION FURNACE |
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Overview | Standard Features | Available Options | Information Request BTU’s Meridian quartz lined furnaces have been optimized for in-line diffusion applications typically processing phosphorus doped silicon wafers. The furnaces feature cross-belt temperature uniformity control, a quartz lined process chamber and precision atmosphere control. The in-line process offers less wafer handling and greater through-put than traditional batch processing. Reduced handling translates into less wafer breakage and improved yield. Typical processing times are 20-25 minutes.
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