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Overview
| Standard Features
| Available Options
| Information Request
STANDARD FEATURES INCLUDE:
Quartz Lined Process Chamber
Integrated Doper and Furnace Control
Metal-Free Dopant Delivery System
Precision Atmosphere Flow Control
Pre-Heated Gas Inlets
Controlled Water Cooling
Left, Center, Right Heater Trim Control
Nichrome V Conveyor Belt
WINCON™ Multi-Language Control Software
Heated Exhaust with Condensation Traps
Ultrasonic Belt Cleaner
Light Tower
PRODUCTS:
Meridian In-Line Diffusion System
• Meridian Diffusion Furnace
Metallization
• Anti Reflective Coating
PROCESS:
Diffusion
• Metallization
• Anti Reflective Coating
• Thin Film
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