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PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers

PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers

Presented at IEEE – 2010 — There is growing interest in adopting in-line diffusion on an industrial scale. In this paper an old concern of metal contamination from conveyor belts is explored using SIMS analysis.

  • Date: February 3, 2015
  • Type: application/pdf
  • Size: (211.3 KB)