INLINE DIFFUSION FURNACE
BTU’s Meridian™ family of inline diffusion furnaces and dopant application systems provide the greatest flexibility and configurability resulting in a wide range of solutions which support current and future cell structures including: p-type traditional and PERC cells, n-type bi-facial and back contact cells.
Meridian furnaces provide unparalleled thermal uniformity (±2°C) ensuring repeatable lane-to-lane sheet resistance results and junction depth control. Sheet resistances over 150 ohms per square can be easily achieved with excellent junction uniformity. Meridian furnaces can also be used for processing p-type or n-type cells due to its maximum temperature capabilities up to 1000°C, enabling phosphorous, boron or co-diffused thermal profile requirements.
If inline diffusion is not an option consider BTU’s sister company, Tempress. Tempress, located in the Netherlands, is the world’s leading supplier of automated batch diffusion furnaces for the POCl3 diffusion process with an impressive install base in excess of 30GW. Click here to visit Tempress’ website to learn more.
Contact BTU to learn more about our diffusion furnace solutions.