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BTU is part of the Amtech Group

Founded in 1981, Amtech Systems is a trusted global supplier of essential semiconductor equipment and consumables serving various industries within the power semiconductor market, including mobile, computing, industrial, automotive, telecom, medical, and more.

Amtech Systems


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BTU International Logo

BTU has been a technology leader in the field of thermal process systems since 1950. BTU’s systems are used for semiconductor, advanced packaging, electronics assembly and materials processing.


BTU International Logo

Founded in 1968, Entrepix, Inc.is a globally recognized expert in chemical mechanical polishing (CMP) and wafer cleaning.  Entrepix offers capital equipment, upgrades and related services for the silicon and compound semiconductor cleaning and CMP applications.


PR Hoffman Amtech Group Logo

PR Hoffman offers complete lapping, grinding and polishing machine product lines for a variety of manufacturing processing needs for applications such as SiC, quartz, optics, semiconductor, LED, electronics, ceramics and metalworking.


Intersurface Dynamics Amtech Group Logo

Intersurface Dynamics designs, manufactures, and sells application-specific chemicals for processes used in the production of Silicon, Silicon Carbide, and Sapphire wafers: lenses made of different glass and laser materials; integrated circuits; and display and flat glass.


Amtech Systems Power Semiconductor