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Bruce Diffusion Furnaces

Horizontal Tube Furnaces for Semiconductor Applications

Bruce Diffusion Furnaces

Bruce Technologies has become part of BTU International.  BTU and Bruce Technologies are sister companies  within the Amtech Group.   Both companies are co-located in Billerica, MA and were one company decades ago before divestiture in the 1990’s.   Bruce Technologies specializes in horizontal, tube furnaces for semiconductor applications.

  • OEM of the Bruce Diffusion Furnace (BDF)
  • Over 1000 Furnaces Sold Worldwide
  • Over 30 Years of Experience
  • High Reliability
  • Low Cost of Ownership

With nearly 6,000 horizontal furnace tubes delivered worldwide, Bruce Technologies is the established industry leader for digitally controlled horizontal furnaces. Bruce BDF-Series of horizontal furnaces offer customers proven reliability, state-of the-art thermal technology, precision loading, superior throughput performance, reduced cost-of-ownership (COO) and the support of a world-wide organization.

Referred to as the most reliable furnaces in the industry, Bruce Technologies offers models of horizontal furnaces for 100 – 300mm wafers. To further enhance the capabilities of the furnaces, Bruce Technologies offers an array of system options including semi-automated and fully automated loading systems for total system flexibility.

Bruce offers a variety of horizontal furnace upgrades that are specifically designed to maximize performance and minimize cost-of-ownership. With over 30 years of OEM experience, Bruce remains your first choice for all types of furnace equipment upgrades. We are committed to supporting our existing installation base of equipment and customers with new and refurbished horizontal diffusion furnaces. We also supply (1) the buyers, resellers and refurb-houses that deal in used Bruce Diffusion Furnaces and (2) any horizontal furnace OEMs with our Atmoscan and Automation products.The list below represents a sample of available retrofits. For additional details, please contact your Bruce Technologies representative.

  • New BDF Diffusion Furnaces

  • Used and refurbished BDF Diffusion Furnaces

  • Complete furnace rebuilds

  • Wafer size upgrades

    Bruce Furnace Controller

  • Process conversions

  • Thermal control enhancements

  • Boatloader & wafer loading upgrades

  • Control system conversions

  • Gas distribution modifications

  • Furnace automation solutions

  • Replacement heating elements

With over four decades in the industry, Bruce has the experience necessary to meet your current needs, and to lead the way to advancing technologies.  With our manufacturing center in North America, and experienced professionals located throughout the world our team is available to assist you with your equipment, conversions and Apex requests.

To learn more about Bruce Technologies Diffusion Furnaces visit the Bruce Technologies website or email us at BruceTechnologies@btu.com.